Effects of Oxygen Precursor on Resistive Switching Properties of CMOS Compatible HfO<sub>2</sub>-Based RRAM
In this work, we investigate the resistive switching behaviors of HfO<sub>2</sub>-based resistive random-access memory (RRAM) in two different oxidants (H<sub>2</sub>O and O<sub>3</sub>) in an atomic layer deposition system. Firstly, the surface characteristics of...
| Published in: | Metals |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-4701/11/9/1350 |