Research on the Preparation and Application of Fixed-Abrasive Tools Based on Solid-Phase Reactions for Sapphire Wafer Lapping and Polishing

Single-crystal sapphire specimen (α-Al₂O₃) have been widely applied in the semiconductor industry, microelectronics, and so on. In order to shorten the production time and improve the processing efficiency of sapphire processing, an integrated fixed-abra...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Linlin Cao, Xiaolong Zhou, Yingjie Wang, Zhilun Yang, Duowen Chen, Wei Wei, Kaibao Wang
Format:	Article
Language:	English
Published:	MDPI AG 2023-09-01
Subjects:	sapphire wafer fixed-abrasive tool surface roughness material removal rate lapping and polishing
Online Access:	https://www.mdpi.com/2072-666X/14/9/1797