Deposition of Coatings of Tungsten and Two-Layer Copper-Tungsten Composition

In the work a technology of tungsten films and two-layer copper-tungsten coatings deposition on stainless steel substrates was developed. The coatings were deposited by magnetron and arc sputtering of materials with condensation of them on the testing substrates. The deposition objects were probe of...

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Bibliographic Details

Published in:	East European Journal of Physics
Main Authors:	S. Alimov, Nikolay Azarenkov, Valentyn Bobkov, I. Okseniuk, A. Skrypnyk, Roman Starovoytov, Lyudmila Tischenko
Format:	Article
Language:	English
Published:	V.N. Karazin Kharkiv National University Publishing 2013-02-01
Subjects:	sputtering systems multilayer coatings tungsten films copper films adhesion
Online Access:	http://periodicals.karazin.ua/eejp/article/view/13520