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林子根
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1
Material Properties of Y2O3 , YF3 and YOF Coatings for Anti-Plasma Erosion Applications
by
Tzu-Ken Lin
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Published 2018
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2
Investigation of TFT-LCD SiNx Etching Using Enhanced Capacitive-Coupled High-Density Plasma
by
Tzu-Ken Lin
,
林子
根
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