Effect of the SiCl4 Flow Rate on SiBN Deposition Kinetics in SiCl4-BCl3-NH3-H2-Ar Environment

by Jianping Li, Hailong Qin, Yongsheng Liu, Fang Ye, Zan Li, Laifei Cheng, Litong Zhang
Published 2017-06-01

Mechanical and dielectric properties of porous and wave-transparent Si3N4-Si3N4 composite ceramics fabricated by 3D printing combined with chemical vapor infiltration

by Zanlin Cheng, Fang Ye, Yongsheng Liu, Tianlu Qiao, Jianping Li, Hailong Qin, Laifei Cheng, Litong Zhang
Published 2019-08-01

Microstructure and Dielectric Properties of LPCVD/CVI-SiBCN Ceramics Annealed at Different Temperatures

by Jianping Li, Mingxi Zhao, Yongsheng Liu, Nan Chai, Fang Ye, Hailong Qin, Laifei Cheng, Litong Zhang
Published 2017-06-01