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Kham, M.N
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Kham, M.N
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Kham, M.N
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1
Reduced boron diffusion under interstitial injection in fluorine implanted silicon
by
Kham
,
M.N
,
Matko, I.
,
Chenevier, B.
,
Ashburn, P.
Published 2007
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2
Study of fluorine behaviour in silicon by selective point defect injection
by
Kham
,
M.N
,
El Mubarek, H.A.W
,
Bonar, J.M
,
Ashburn, P.
Published 2005
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3
Effect of fluorine on boron diffusion under interstitial injection from the surface
by
Kham
,
M.N
,
El Mubarek, H.A.W
,
Bonar, J.M
,
Chivers, D.
,
Ashburn, P.
Published 2006
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4
110GHz fT Silicon Bipolar Transistors Implemented using Fluorine Implantation for Boron Diffusion Suppression
by
Kham
,
M.N
,
El Mubarek, H.A.W
,
Bonar, J.M
,
Ashburn, P.
,
Ward, P.
,
Fiore, L.
,
Petralia, R.
,
Alemanni, C.
,
Messina, A.
Published 2006
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