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1by I-Ju Teng, Kea-Tiong Tang, Gia-Nan Shi, Chang-Ping Chang, Shang-Ren Yang, Tseng-Hsiung Su, Han-Wen Kuo, Cheng-Long Ho, Li-Chun Wang, Cheng-Tzu KuoGet full text
Published 2011-08-01
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8Deposition and property analyses of ternary Si-C-N thin films on Si wafer by RF magnetron sputteringOther Authors: “...Cheng-Tzu Kuo...”
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13Effects of Si source, catalysts and chemical pretreatment on deposition and properties of SiCN filmsOther Authors: “...Cheng Tzu Kuo...”
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