Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Characterising a Custom-Built Radio Frequency PECVD Reactor to Vary the Mechanical Properties of TMDSO Films

Plasma-polymerised tetramethyldisiloxane (TMDSO) films are frequently applied as coatings for their abrasion resistance and barrier properties. By manipulating the deposition parameters, the chemical structure and thus mechanical properties of the films can also be controlled. These mechanical prope...

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Bibliographic Details
Main Authors: Racim Radjef, Karyn L. Jarvis, Colin Hall, Andrew Ang, Bronwyn L. Fox, Sally L. McArthur
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Molecules
Subjects:
mechanical properties
PECVD
plasma polymerization
thin films
TMDSO
Online Access:https://www.mdpi.com/1420-3049/26/18/5621

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