A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition betw...

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Bibliographic Details
Main Authors: Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Sensors
Subjects:
high Q-factor
liquid media
out-of-plane
piezoelectric
AlN
cantilever
Online Access:https://www.mdpi.com/1424-8220/19/3/658

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