Review of micromachined optical accelerometers: from mg to sub-μg
Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent y...
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Institue of Optics and Electronics, Chinese Academy of Sciences
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doaj-0811e56bb7a74893b34bdf4253e61cc32021-09-02T08:19:51ZengInstitue of Optics and Electronics, Chinese Academy of SciencesOpto-Electronic Advances2096-45792021-03-014312410.29026/oea.2021.200045oea-2020-0045-HuangweiReview of micromachined optical accelerometers: from mg to sub-μgQianbo Lu0Yinan Wang1Xiaoxu Wang2Yuan Yao3Xuewen Wang4Wei Huang5Frontiers Science Center for Flexible Electronics (FSCFE), Shaanxi Institute of Flexible Electronics (SIFE) Shaanxi Institute of Biomedical Materials and Engineering (SIBME), Northwestern Polytechnical University, Xi'an 710072, ChinaThe Key Laboratory of Information Fusion Technology, Ministry of Education, School of Automation, Northwestern Polytechnical University, Xi'an 710072, ChinaThe Key Laboratory of Information Fusion Technology, Ministry of Education, School of Automation, Northwestern Polytechnical University, Xi'an 710072, ChinaWuhan National Laboratory for Optoelectronics-Huazhong University of Science and Technology, Wuhan 430074, China.Frontiers Science Center for Flexible Electronics (FSCFE), Shaanxi Institute of Flexible Electronics (SIFE) Shaanxi Institute of Biomedical Materials and Engineering (SIBME), Northwestern Polytechnical University, Xi'an 710072, ChinaFrontiers Science Center for Flexible Electronics (FSCFE), Shaanxi Institute of Flexible Electronics (SIFE) Shaanxi Institute of Biomedical Materials and Engineering (SIBME), Northwestern Polytechnical University, Xi'an 710072, ChinaMicro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent years, with the in-depth research and development of MOEMS accelerometers, the community is flourishing with the possible applications in seismic monitoring, inertial navigation, aerospace and other industrial and military fields. There have been a variety of schemes of MOEMS accelerometers, whereas the performances differ greatly due to different measurement principles and corresponding application requirements. This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers. According to the optical measurement principle, we divide the MOEMS accelerometers into three categories: the geometric optics based, the wave optics based, and the new optomechanical accelerometers. Regarding the most widely studied category, the wave optics based accelerometers are further divided into four sub-categories, which is based on grating interferometric cavity, Fiber Bragg Grating (FBG), Fabry-Perot cavity, and photonic crystal, respectively. Following a brief introduction to the measurement principles, the typical performances, advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations. This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.http://www.oejournal.org/article/doi/10.29026/oea.2021.200045accelerometermicro-opto-electro-mechanical systems (moems)integrated opticsaccelerometer review |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Qianbo Lu Yinan Wang Xiaoxu Wang Yuan Yao Xuewen Wang Wei Huang |
spellingShingle |
Qianbo Lu Yinan Wang Xiaoxu Wang Yuan Yao Xuewen Wang Wei Huang Review of micromachined optical accelerometers: from mg to sub-μg Opto-Electronic Advances accelerometer micro-opto-electro-mechanical systems (moems) integrated optics accelerometer review |
author_facet |
Qianbo Lu Yinan Wang Xiaoxu Wang Yuan Yao Xuewen Wang Wei Huang |
author_sort |
Qianbo Lu |
title |
Review of micromachined optical accelerometers: from mg to sub-μg |
title_short |
Review of micromachined optical accelerometers: from mg to sub-μg |
title_full |
Review of micromachined optical accelerometers: from mg to sub-μg |
title_fullStr |
Review of micromachined optical accelerometers: from mg to sub-μg |
title_full_unstemmed |
Review of micromachined optical accelerometers: from mg to sub-μg |
title_sort |
review of micromachined optical accelerometers: from mg to sub-μg |
publisher |
Institue of Optics and Electronics, Chinese Academy of Sciences |
series |
Opto-Electronic Advances |
issn |
2096-4579 |
publishDate |
2021-03-01 |
description |
Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent years, with the in-depth research and development of MOEMS accelerometers, the community is flourishing with the possible applications in seismic monitoring, inertial navigation, aerospace and other industrial and military fields. There have been a variety of schemes of MOEMS accelerometers, whereas the performances differ greatly due to different measurement principles and corresponding application requirements. This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers. According to the optical measurement principle, we divide the MOEMS accelerometers into three categories: the geometric optics based, the wave optics based, and the new optomechanical accelerometers. Regarding the most widely studied category, the wave optics based accelerometers are further divided into four sub-categories, which is based on grating interferometric cavity, Fiber Bragg Grating (FBG), Fabry-Perot cavity, and photonic crystal, respectively. Following a brief introduction to the measurement principles, the typical performances, advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations. This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement. |
topic |
accelerometer micro-opto-electro-mechanical systems (moems) integrated optics accelerometer review |
url |
http://www.oejournal.org/article/doi/10.29026/oea.2021.200045 |
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