Review of micromachined optical accelerometers: from mg to sub-μg
Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent y...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2021-03-01
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| Series: | Opto-Electronic Advances |
| Subjects: | |
| Online Access: | http://www.oejournal.org/article/doi/10.29026/oea.2021.200045 |