Optimal Design of Electromagnetically Actuated MEMS Cantilevers

Optimal Design of Electromagnetically Actuated MEMS Cantilevers

In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subseque...

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Main Authors: Paolo Di Barba, Teodor Gotszalk, Wojciech Majstrzyk, Maria Evelina Mognaschi, Karolina Orłowska, Sławomir Wiak, Andrzej Sierakowski
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Sensors
Subjects:
electromagnetically actuated cantilevers
nanometrology
multiobjective optimization
active cantilevers
SOI-based prototyping
Online Access:http://www.mdpi.com/1424-8220/18/8/2533
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spelling doaj-0a25170b8d554ea4a6b95010c1de228b2020-11-25T00:53:41ZengMDPI AGSensors1424-82202018-08-01188253310.3390/s18082533s18082533Optimal Design of Electromagnetically Actuated MEMS CantileversPaolo Di Barba0Teodor Gotszalk1Wojciech Majstrzyk2Maria Evelina Mognaschi3Karolina Orłowska4Sławomir Wiak5Andrzej Sierakowski6Department of Electrical, Computer and Biomedical Engineering, University of Pavia, I-27100 Pavia, ItalyFaculty of Microsystem, Electronics and Photonics, Wrocław University of Science and Technology, PL-50372 Wrocław, PolandFaculty of Microsystem, Electronics and Photonics, Wrocław University of Science and Technology, PL-50372 Wrocław, PolandDepartment of Electrical, Computer and Biomedical Engineering, University of Pavia, I-27100 Pavia, ItalyFaculty of Microsystem, Electronics and Photonics, Wrocław University of Science and Technology, PL-50372 Wrocław, PolandInstitute of Mechatronics and Information Systems, Łódź University of Technology, PL-90924 Łódź, PolandInstitute of Electron Technology, PL-02668 Warsaw, PolandIn this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed cantilevers are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.http://www.mdpi.com/1424-8220/18/8/2533electromagnetically actuated cantileversnanometrologymultiobjective optimizationactive cantileversSOI-based prototyping
collection DOAJ
language English
format Article
sources DOAJ
author Paolo Di Barba
Teodor Gotszalk
Wojciech Majstrzyk
Maria Evelina Mognaschi
Karolina Orłowska
Sławomir Wiak
Andrzej Sierakowski
spellingShingle Paolo Di Barba
Teodor Gotszalk
Wojciech Majstrzyk
Maria Evelina Mognaschi
Karolina Orłowska
Sławomir Wiak
Andrzej Sierakowski
Optimal Design of Electromagnetically Actuated MEMS Cantilevers
Sensors
electromagnetically actuated cantilevers
nanometrology
multiobjective optimization
active cantilevers
SOI-based prototyping
author_facet Paolo Di Barba
Teodor Gotszalk
Wojciech Majstrzyk
Maria Evelina Mognaschi
Karolina Orłowska
Sławomir Wiak
Andrzej Sierakowski
author_sort Paolo Di Barba
title Optimal Design of Electromagnetically Actuated MEMS Cantilevers
title_short Optimal Design of Electromagnetically Actuated MEMS Cantilevers
title_full Optimal Design of Electromagnetically Actuated MEMS Cantilevers
title_fullStr Optimal Design of Electromagnetically Actuated MEMS Cantilevers
title_full_unstemmed Optimal Design of Electromagnetically Actuated MEMS Cantilevers
title_sort optimal design of electromagnetically actuated mems cantilevers
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2018-08-01
description In this paper we present the numerical and experimental results of a design optimization of electromagnetic cantilevers. In particular, a cost-effective technique of evolutionary computing enabling the simultaneous minimization of multiple criteria is applied. A set of optimal solutions are subsequently fabricated and measured. The designed cantilevers are fabricated in arrays, which makes the comparison and measurements of the sensor properties reliable. The microfabrication process, based on the silicon on insulator (SOI) technology, is proposed in order to minimize parasitic phenomena and enable efficient electromagnetic actuation. Measurements on the fabricated prototypes assessed the proposed methodological approach.
topic electromagnetically actuated cantilevers
nanometrology
multiobjective optimization
active cantilevers
SOI-based prototyping
url http://www.mdpi.com/1424-8220/18/8/2533
work_keys_str_mv AT paolodibarba optimaldesignofelectromagneticallyactuatedmemscantilevers
AT teodorgotszalk optimaldesignofelectromagneticallyactuatedmemscantilevers
AT wojciechmajstrzyk optimaldesignofelectromagneticallyactuatedmemscantilevers
AT mariaevelinamognaschi optimaldesignofelectromagneticallyactuatedmemscantilevers
AT karolinaorłowska optimaldesignofelectromagneticallyactuatedmemscantilevers
AT sławomirwiak optimaldesignofelectromagneticallyactuatedmemscantilevers
AT andrzejsierakowski optimaldesignofelectromagneticallyactuatedmemscantilevers
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