Effect of Thickness of Molybdenum Nano-Interlayer on Cohesion between Molybdenum/Titanium Multilayer Film and Silicon Substrate

Effect of Thickness of Molybdenum Nano-Interlayer on Cohesion between Molybdenum/Titanium Multilayer Film and Silicon Substrate

Titanium (Ti) film has been used as a hydrogen storage material. The effect of the thickness of a molybdenum (Mo) nano-interlayer on the cohesive strength between a Mo/Ti multilayer film and a single crystal silicon (Si) substrate was investigated by X-ray diffraction (XRD), scanning electron micros...

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Bibliographic Details
Main Authors: Huahai Shen, Bing Yao, Jianwei Zhang, Xinqiao Zhu, Xia Xiang, Xiaosong Zhou, Xiaotao Zu
Format: Article
Language:English
Published: MDPI AG 2019-04-01
Series:Nanomaterials
Subjects:
titanium film
interlayer
cohesion
residual stress
nano-indenter
Online Access:https://www.mdpi.com/2079-4991/9/4/616

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