Design, Development, and Characterization of a Low Frequency CMUT-Based Anemometer

• Main Authors: Mayank B. Thacker, Arezoo Emadi, Douglas A. Buchanan
• Format: Article
• Language: English
• Published: IEEE 2021-01-01
• Series: IEEE Access
• Subjects: CMUTs; low frequency; MEMS; PolyMUMPs; polysilicon membrane; ultrasound
• Online Access: https://ieeexplore.ieee.org/document/9535497/

The design fabrication and development of a 67.5 kHz capacitive micromachined ultrasonic transducer (CMUT) suited for Martian anemometry is presented in this paper. To have low signal attenuation under Martian conditions, the device operating frequency is limited to 100 kHz. This is due to the low-density carbon dioxide (CO₂) atmosphere and acoustic impedance mismatch transduction losses. CMUTs capable of generating frequencies less than 100 kHz need either large Silicon area or higher operating voltages. This is a problem for the battery operation and portability of devices. The devices presented in this paper are designed and fabricated using low cost commercially available surface micromachining technique. COMSOL Multiphysics and MATLAB simulations were used to analyze the device critical design parameters and investigate the operability of devices. Simulation results show that the designed single cell 170-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> radius membrane has a resonant frequency &#x007E;65 kHz. The device exhibits a static displacement of 105nm under 20 V DC bias. Using the developed single cell model, a <inline-formula> <tex-math notation="LaTeX">$3\times 10$ </tex-math></inline-formula> array CMUT anemometer was fabricated and evaluated that generates a &#x007E;65 kHz acoustic signal in lab environment. This proposed CMUT anemometer can operate for a supply &#x003C; 38 V. The device performance was evaluated using a commercial air-coupled capacitive microphone named CAP1. Successful transmit-receive of ultrasound from the developed 2D array to CAP1 for separation in the range of 1&#x2013;15 cm was performed. The experiment results performed in lab environment show the speed of sound and the atmospheric attenuation can be accurately measured using this developed technology with a &#x00B1;5&#x0025; accuracy.