Design, Development, and Characterization of a Low Frequency CMUT-Based Anemometer
The design fabrication and development of a 67.5 kHz capacitive micromachined ultrasonic transducer (CMUT) suited for Martian anemometry is presented in this paper. To have low signal attenuation under Martian conditions, the device operating frequency is limited to 100 kHz. This is due to the low-d...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9535497/ |