Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity

We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor (MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensiti...

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Bibliographic Details
Main Authors: Nico F. de Rooij, Peter Vettiger, Tomonobu Nakayama, Sebastian Gautsch, Kota Shiba, Frederic Loizeau, Terunobu Akiyama, Genki Yoshikawa, Masakazu Aono
Format: Article
Language:English
Published: MDPI AG 2012-11-01
Series:Sensors
Subjects:
Membrane-type Surface stress Sensor (MSS)
nanomechanical sensors
piezoresistive
MEMS/NEMS
Online Access:http://www.mdpi.com/1424-8220/12/11/15873

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