Characteristics of Metal–Semiconductor–Metal Ultraviolet Photodetectors Based on Pure ZnO/Amorphous IGZO Thin-Film Structures

Characteristics of Metal–Semiconductor–Metal Ultraviolet Photodetectors Based on Pure ZnO/Amorphous IGZO Thin-Film Structures

In this study, metal–semiconductor–metal-structured ultraviolet (UV) photodetectors (PDs) based on pure zinc oxide (ZnO) and amorphous indium gallium zinc oxide (a-IGZO) thin films were fabricated and characterized. The ZnO seed layers were deposited on Corning glass substrates via a radio frequency...

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Bibliographic Details
Main Authors:	Kin-Tak Lam, Sheng-Joue Young, Yen-Lin Chu, Chi-Nan Tsai, Tung-Te Chu, Ting-Sung Lu, Liang-Wen Ji
Format:	Article
Language:	English
Published:	Hindawi Limited 2021-01-01
Series:	Journal of Nanomaterials
Online Access:	http://dx.doi.org/10.1155/2021/6649200

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