A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In2O3 Nanoparticles at Room Temperature

A Highly Sensitive FET-Type Humidity Sensor with Inkjet-Printed Pt-In2O3 Nanoparticles at Room Temperature

Abstract In this work, Pt-doped In2O3 nanoparticles (Pt-In2O3) were inkjet printed on a FET-type sensor platform that has a floating gate horizontally aligned with a control gate for humidity detection at room temperature. The relative humidity (RH)-sensing behavior of the FET-type sensor was invest...

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Bibliographic Details
Main Authors: Meile Wu, Zhanyu Wu, Xiaoshi Jin, Jong-Ho Lee
Format: Article
Language:English
Published: SpringerOpen 2020-10-01
Series:Nanoscale Research Letters
Subjects:
Pt-In2O3
Inkjet printing
Humidity sensor
FET sensor
Work function
Online Access:http://link.springer.com/article/10.1186/s11671-020-03426-6

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