A Lorentz Force Actuated Continuous Deformable Polymer Mirror for Wavefront Control
This paper describes MEMS deformable polymer mirror system for adaptive optics application. This system employs a 4 µm thick SU-8 membrane with a stress balanced double side aluminum coating as a mirror element. Underlying Lorentz actuators are used to control the surface topography of the mirror, e...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-08-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/1/4/554 |