X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors

X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavef...

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Main Authors:	Jumpei Yamada, Takato Inoue, Nami Nakamura, Takashi Kameshima, Kazuto Yamauchi, Satoshi Matsuyama, Makina Yabashi
Format:	Article
Language:	English
Published:	MDPI AG 2020-12-01
Series:	Sensors
Subjects:	X-ray mirror X-ray nanofocusing wavefront correction grating interferometer
Online Access:	https://www.mdpi.com/1424-8220/20/24/7356

id	doaj-16d4f53b0c9845f5b77b60c9d027360c
record_format	Article
spelling	doaj-16d4f53b0c9845f5b77b60c9d027360c2020-12-22T00:06:17ZengMDPI AGSensors1424-82202020-12-01207356735610.3390/s20247356X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing MirrorsJumpei Yamada0Takato Inoue1Nami Nakamura2Takashi Kameshima3Kazuto Yamauchi4Satoshi Matsuyama5Makina Yabashi6RIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, JapanDivision of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanDivision of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanRIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, JapanDivision of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanDivision of Precision Engineering and Applied Physics, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, JapanRIKEN SPring-8 Center, 1-1-1 Kouto, Sayo, Hyogo 679-5148, JapanX-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than <i>λ</i>/72 in root-mean-square value.https://www.mdpi.com/1424-8220/20/24/7356X-ray mirrorX-ray nanofocusingwavefront correctiongrating interferometer
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Jumpei Yamada Takato Inoue Nami Nakamura Takashi Kameshima Kazuto Yamauchi Satoshi Matsuyama Makina Yabashi
spellingShingle	Jumpei Yamada Takato Inoue Nami Nakamura Takashi Kameshima Kazuto Yamauchi Satoshi Matsuyama Makina Yabashi X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors Sensors X-ray mirror X-ray nanofocusing wavefront correction grating interferometer
author_facet	Jumpei Yamada Takato Inoue Nami Nakamura Takashi Kameshima Kazuto Yamauchi Satoshi Matsuyama Makina Yabashi
author_sort	Jumpei Yamada
title	X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors
title_short	X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors
title_full	X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors
title_fullStr	X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors
title_full_unstemmed	X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors
title_sort	x-ray single-grating interferometry for wavefront measurement and correction of hard x-ray nanofocusing mirrors
publisher	MDPI AG
series	Sensors
issn	1424-8220
publishDate	2020-12-01
description	X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than <i>λ</i>/72 in root-mean-square value.
topic	X-ray mirror X-ray nanofocusing wavefront correction grating interferometer
url	https://www.mdpi.com/1424-8220/20/24/7356
work_keys_str_mv	AT jumpeiyamada xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors AT takatoinoue xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors AT naminakamura xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors AT takashikameshima xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors AT kazutoyamauchi xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors AT satoshimatsuyama xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors AT makinayabashi xraysinglegratinginterferometryforwavefrontmeasurementandcorrectionofhardxraynanofocusingmirrors
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X-ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-ray Nanofocusing Mirrors

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