Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondar...
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doaj-19cabcd3ba0a48b7aa167dd6f2bf3a212021-09-25T23:57:39ZengMDPI AGCrystals2073-43522021-09-01111082108210.3390/cryst11091082Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered StructureDmitry Roshchupkin0Evgenii Emelin1Olga Plotitcina2Anatoly Mololkin3Oleg Telminov4Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaInstitute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaInstitute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaInstitute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaMolecular Electronics Research Institute, 124460 Moscow, RussiaThe propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO<sub>3</sub>/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO<sub>3</sub>/Si layered structure and in a bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO<sub>3</sub>/Si structure exceed the typical SAW velocities for LiNbO<sub>3</sub> and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO<sub>3</sub>/Si layered structure and in the bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal.https://www.mdpi.com/2073-4352/11/9/1082LiNbO<sub>3</sub> crystalSi crystalsurface acoustic waveX-ray diffractionscanning electron microscopyLiNbO<sub>3</sub>/Si layered structure |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Dmitry Roshchupkin Evgenii Emelin Olga Plotitcina Anatoly Mololkin Oleg Telminov |
spellingShingle |
Dmitry Roshchupkin Evgenii Emelin Olga Plotitcina Anatoly Mololkin Oleg Telminov Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure Crystals LiNbO<sub>3</sub> crystal Si crystal surface acoustic wave X-ray diffraction scanning electron microscopy LiNbO<sub>3</sub>/Si layered structure |
author_facet |
Dmitry Roshchupkin Evgenii Emelin Olga Plotitcina Anatoly Mololkin Oleg Telminov |
author_sort |
Dmitry Roshchupkin |
title |
Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure |
title_short |
Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure |
title_full |
Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure |
title_fullStr |
Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure |
title_full_unstemmed |
Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure |
title_sort |
scanning electron microscopy investigation of surface acoustic wave propagation in a 41° yx-cut of a linbo<sub>3</sub> crystal/si layered structure |
publisher |
MDPI AG |
series |
Crystals |
issn |
2073-4352 |
publishDate |
2021-09-01 |
description |
The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO<sub>3</sub>/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO<sub>3</sub>/Si layered structure and in a bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO<sub>3</sub>/Si structure exceed the typical SAW velocities for LiNbO<sub>3</sub> and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO<sub>3</sub>/Si layered structure and in the bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal. |
topic |
LiNbO<sub>3</sub> crystal Si crystal surface acoustic wave X-ray diffraction scanning electron microscopy LiNbO<sub>3</sub>/Si layered structure |
url |
https://www.mdpi.com/2073-4352/11/9/1082 |
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