Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure

The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondar...

Full description

Bibliographic Details
Main Authors: Dmitry Roshchupkin, Evgenii Emelin, Olga Plotitcina, Anatoly Mololkin, Oleg Telminov
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Crystals
Subjects:
LiNbO<sub>3</sub> crystal
Si crystal
surface acoustic wave
X-ray diffraction
scanning electron microscopy
LiNbO<sub>3</sub>/Si layered structure
Online Access:https://www.mdpi.com/2073-4352/11/9/1082
id doaj-19cabcd3ba0a48b7aa167dd6f2bf3a21
record_format Article
spelling doaj-19cabcd3ba0a48b7aa167dd6f2bf3a212021-09-25T23:57:39ZengMDPI AGCrystals2073-43522021-09-01111082108210.3390/cryst11091082Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered StructureDmitry Roshchupkin0Evgenii Emelin1Olga Plotitcina2Anatoly Mololkin3Oleg Telminov4Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaInstitute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaInstitute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaInstitute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Academician Ossipyan St. 6, 142432 Chernogolovka, RussiaMolecular Electronics Research Institute, 124460 Moscow, RussiaThe propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO<sub>3</sub>/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO<sub>3</sub>/Si layered structure and in a bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO<sub>3</sub>/Si structure exceed the typical SAW velocities for LiNbO<sub>3</sub> and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO<sub>3</sub>/Si layered structure and in the bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal.https://www.mdpi.com/2073-4352/11/9/1082LiNbO<sub>3</sub> crystalSi crystalsurface acoustic waveX-ray diffractionscanning electron microscopyLiNbO<sub>3</sub>/Si layered structure
collection DOAJ
language English
format Article
sources DOAJ
author Dmitry Roshchupkin
Evgenii Emelin
Olga Plotitcina
Anatoly Mololkin
Oleg Telminov
spellingShingle Dmitry Roshchupkin
Evgenii Emelin
Olga Plotitcina
Anatoly Mololkin
Oleg Telminov
Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
Crystals
LiNbO<sub>3</sub> crystal
Si crystal
surface acoustic wave
X-ray diffraction
scanning electron microscopy
LiNbO<sub>3</sub>/Si layered structure
author_facet Dmitry Roshchupkin
Evgenii Emelin
Olga Plotitcina
Anatoly Mololkin
Oleg Telminov
author_sort Dmitry Roshchupkin
title Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
title_short Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
title_full Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
title_fullStr Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
title_full_unstemmed Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure
title_sort scanning electron microscopy investigation of surface acoustic wave propagation in a 41° yx-cut of a linbo<sub>3</sub> crystal/si layered structure
publisher MDPI AG
series Crystals
issn 2073-4352
publishDate 2021-09-01
description The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO<sub>3</sub>/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO<sub>3</sub>/Si layered structure and in a bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO<sub>3</sub>/Si structure exceed the typical SAW velocities for LiNbO<sub>3</sub> and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO<sub>3</sub>/Si layered structure and in the bulk 41° YX-cut of a LiNbO<sub>3</sub> crystal.
topic LiNbO<sub>3</sub> crystal
Si crystal
surface acoustic wave
X-ray diffraction
scanning electron microscopy
LiNbO<sub>3</sub>/Si layered structure
url https://www.mdpi.com/2073-4352/11/9/1082
work_keys_str_mv AT dmitryroshchupkin scanningelectronmicroscopyinvestigationofsurfaceacousticwavepropagationina41yxcutofalinbosub3subcrystalsilayeredstructure
AT evgeniiemelin scanningelectronmicroscopyinvestigationofsurfaceacousticwavepropagationina41yxcutofalinbosub3subcrystalsilayeredstructure
AT olgaplotitcina scanningelectronmicroscopyinvestigationofsurfaceacousticwavepropagationina41yxcutofalinbosub3subcrystalsilayeredstructure
AT anatolymololkin scanningelectronmicroscopyinvestigationofsurfaceacousticwavepropagationina41yxcutofalinbosub3subcrystalsilayeredstructure
AT olegtelminov scanningelectronmicroscopyinvestigationofsurfaceacousticwavepropagationina41yxcutofalinbosub3subcrystalsilayeredstructure
_version_ 1717367353701826560

Similar Items