Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond

Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond

Fragment ions produced from hexamethyldigermane (HMDG) were identified using an ion beam system. The possible chemical formulae for these ions are CH3+, C2H4+, Ge+, GeCHx+, and GeC3Hx+. Among the fragment ions, GeCHx+ ions were mass-selected and irradiated to a Si substrate at room temperature. The...

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Main Authors: Satoru Yoshimura, Satoshi Sugimoto, Takae Takeuchi, Masato Kiuchi
Format: Article
Language:English
Published: AIP Publishing LLC 2019-02-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5084181
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spelling doaj-1b4a6fd32c9b4c189a23e829b8a1f7912020-11-25T02:27:41ZengAIP Publishing LLCAIP Advances2158-32262019-02-0192025008025008-510.1063/1.5084181011902ADVIdentification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bondSatoru Yoshimura0Satoshi Sugimoto1Takae Takeuchi2Masato Kiuchi3Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, JapanCenter for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, JapanDepartment of Chemistry, Nara Women’s University, Kitauoyanishi-machi, Nara, Nara 630-8506, JapanCenter for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, JapanFragment ions produced from hexamethyldigermane (HMDG) were identified using an ion beam system. The possible chemical formulae for these ions are CH3+, C2H4+, Ge+, GeCHx+, and GeC3Hx+. Among the fragment ions, GeCHx+ ions were mass-selected and irradiated to a Si substrate at room temperature. The ion energy was set at approximately 10 eV. The analyses of the film deposited on the substrate suggested that GeCHx+ ion beam produced from HMDG was useful for germanium-carbon film formation.http://dx.doi.org/10.1063/1.5084181
collection DOAJ
language English
format Article
sources DOAJ
author Satoru Yoshimura
Satoshi Sugimoto
Takae Takeuchi
Masato Kiuchi
spellingShingle Satoru Yoshimura
Satoshi Sugimoto
Takae Takeuchi
Masato Kiuchi
Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
AIP Advances
author_facet Satoru Yoshimura
Satoshi Sugimoto
Takae Takeuchi
Masato Kiuchi
author_sort Satoru Yoshimura
title Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
title_short Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
title_full Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
title_fullStr Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
title_full_unstemmed Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
title_sort identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing ge-c bond
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2019-02-01
description Fragment ions produced from hexamethyldigermane (HMDG) were identified using an ion beam system. The possible chemical formulae for these ions are CH3+, C2H4+, Ge+, GeCHx+, and GeC3Hx+. Among the fragment ions, GeCHx+ ions were mass-selected and irradiated to a Si substrate at room temperature. The ion energy was set at approximately 10 eV. The analyses of the film deposited on the substrate suggested that GeCHx+ ion beam produced from HMDG was useful for germanium-carbon film formation.
url http://dx.doi.org/10.1063/1.5084181
work_keys_str_mv AT satoruyoshimura identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond
AT satoshisugimoto identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond
AT takaetakeuchi identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond
AT masatokiuchi identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond
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