Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond
Fragment ions produced from hexamethyldigermane (HMDG) were identified using an ion beam system. The possible chemical formulae for these ions are CH3+, C2H4+, Ge+, GeCHx+, and GeC3Hx+. Among the fragment ions, GeCHx+ ions were mass-selected and irradiated to a Si substrate at room temperature. The...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2019-02-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5084181 |
id |
doaj-1b4a6fd32c9b4c189a23e829b8a1f791 |
---|---|
record_format |
Article |
spelling |
doaj-1b4a6fd32c9b4c189a23e829b8a1f7912020-11-25T02:27:41ZengAIP Publishing LLCAIP Advances2158-32262019-02-0192025008025008-510.1063/1.5084181011902ADVIdentification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bondSatoru Yoshimura0Satoshi Sugimoto1Takae Takeuchi2Masato Kiuchi3Center for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, JapanCenter for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, JapanDepartment of Chemistry, Nara Women’s University, Kitauoyanishi-machi, Nara, Nara 630-8506, JapanCenter for Atomic and Molecular Technologies, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, JapanFragment ions produced from hexamethyldigermane (HMDG) were identified using an ion beam system. The possible chemical formulae for these ions are CH3+, C2H4+, Ge+, GeCHx+, and GeC3Hx+. Among the fragment ions, GeCHx+ ions were mass-selected and irradiated to a Si substrate at room temperature. The ion energy was set at approximately 10 eV. The analyses of the film deposited on the substrate suggested that GeCHx+ ion beam produced from HMDG was useful for germanium-carbon film formation.http://dx.doi.org/10.1063/1.5084181 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Satoru Yoshimura Satoshi Sugimoto Takae Takeuchi Masato Kiuchi |
spellingShingle |
Satoru Yoshimura Satoshi Sugimoto Takae Takeuchi Masato Kiuchi Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond AIP Advances |
author_facet |
Satoru Yoshimura Satoshi Sugimoto Takae Takeuchi Masato Kiuchi |
author_sort |
Satoru Yoshimura |
title |
Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond |
title_short |
Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond |
title_full |
Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond |
title_fullStr |
Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond |
title_full_unstemmed |
Identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing Ge-C bond |
title_sort |
identification of fragment ions produced from hexamethyldigermane and the production of low-energy beam of fragment ion possessing ge-c bond |
publisher |
AIP Publishing LLC |
series |
AIP Advances |
issn |
2158-3226 |
publishDate |
2019-02-01 |
description |
Fragment ions produced from hexamethyldigermane (HMDG) were identified using an ion beam system. The possible chemical formulae for these ions are CH3+, C2H4+, Ge+, GeCHx+, and GeC3Hx+. Among the fragment ions, GeCHx+ ions were mass-selected and irradiated to a Si substrate at room temperature. The ion energy was set at approximately 10 eV. The analyses of the film deposited on the substrate suggested that GeCHx+ ion beam produced from HMDG was useful for germanium-carbon film formation. |
url |
http://dx.doi.org/10.1063/1.5084181 |
work_keys_str_mv |
AT satoruyoshimura identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond AT satoshisugimoto identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond AT takaetakeuchi identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond AT masatokiuchi identificationoffragmentionsproducedfromhexamethyldigermaneandtheproductionoflowenergybeamoffragmentionpossessinggecbond |
_version_ |
1724841397299707904 |