Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy

Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy

Recent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible man...

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Main Authors: Sergio Moreno, Joan Canals, Victor Moro, Nil Franch, Anna Vilà, Albert Romano-Rodriguez, Joan Daniel Prades, Daria D. Bezshlyakh, Andreas Waag, Katarzyna Kluczyk-Korch, Matthias Auf der Maur, Aldo Di Carlo, Sigurd Krieger, Silvana Geleff, Angel Diéguez
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Sensors
Subjects:
CMOS sensor
nano-LED
optical downscaling
nanopositioners
miniaturization
Online Access:https://www.mdpi.com/1424-8220/21/10/3305
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spelling doaj-1bad562c781441e3934e5e0c93cae02a2021-05-31T23:37:50ZengMDPI AGSensors1424-82202021-05-01213305330510.3390/s21103305Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical MicroscopySergio Moreno0Joan Canals1Victor Moro2Nil Franch3Anna Vilà4Albert Romano-Rodriguez5Joan Daniel Prades6Daria D. Bezshlyakh7Andreas Waag8Katarzyna Kluczyk-Korch9Matthias Auf der Maur10Aldo Di Carlo11Sigurd Krieger12Silvana Geleff13Angel Diéguez14Electronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainInstitute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology, Technische Universität Braunschweig, 38106 Braunschweig, GermanyDepartment of Electronic Engineering, University of Rome “Tor Vergara”, 00133 Roma, ItalyDepartment of Electronic Engineering, University of Rome “Tor Vergara”, 00133 Roma, ItalyDepartment of Electronic Engineering, University of Rome “Tor Vergara”, 00133 Roma, ItalyDepartment of Pathology, Medical University of Vienna, 1210 Wien, AustriaDepartment of Pathology, Medical University of Vienna, 1210 Wien, AustriaElectronic and Biomedical Engineering Department, University of Barcelona, 08028 Barcelona, SpainRecent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible manner. This work presents the exploration of their capabilities with two different prototypes. In the first version, a resolution of less than 1 µm was shown thanks to a prototype based on an optically downscaled LED using an LED scanning transmission optical microscopy (STOM) technique. This research demonstrates how this technique can be used to improve STOM images by oversampling the acquisition. The second STOM-based microscope was fabricated with a 200 nm GaN LED. This demonstrates the possibilities for the miniaturization of on-chip-based microscopes.https://www.mdpi.com/1424-8220/21/10/3305CMOS sensornano-LEDoptical downscalingnanopositionersminiaturization
collection DOAJ
language English
format Article
sources DOAJ
author Sergio Moreno
Joan Canals
Victor Moro
Nil Franch
Anna Vilà
Albert Romano-Rodriguez
Joan Daniel Prades
Daria D. Bezshlyakh
Andreas Waag
Katarzyna Kluczyk-Korch
Matthias Auf der Maur
Aldo Di Carlo
Sigurd Krieger
Silvana Geleff
Angel Diéguez
spellingShingle Sergio Moreno
Joan Canals
Victor Moro
Nil Franch
Anna Vilà
Albert Romano-Rodriguez
Joan Daniel Prades
Daria D. Bezshlyakh
Andreas Waag
Katarzyna Kluczyk-Korch
Matthias Auf der Maur
Aldo Di Carlo
Sigurd Krieger
Silvana Geleff
Angel Diéguez
Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy
Sensors
CMOS sensor
nano-LED
optical downscaling
nanopositioners
miniaturization
author_facet Sergio Moreno
Joan Canals
Victor Moro
Nil Franch
Anna Vilà
Albert Romano-Rodriguez
Joan Daniel Prades
Daria D. Bezshlyakh
Andreas Waag
Katarzyna Kluczyk-Korch
Matthias Auf der Maur
Aldo Di Carlo
Sigurd Krieger
Silvana Geleff
Angel Diéguez
author_sort Sergio Moreno
title Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy
title_short Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy
title_full Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy
title_fullStr Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy
title_full_unstemmed Pursuing the Diffraction Limit with Nano-LED Scanning Transmission Optical Microscopy
title_sort pursuing the diffraction limit with nano-led scanning transmission optical microscopy
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2021-05-01
description Recent research into miniaturized illumination sources has prompted the development of alternative microscopy techniques. Although they are still being explored, emerging nano-light-emitting-diode (nano-LED) technologies show promise in approaching the optical resolution limit in a more feasible manner. This work presents the exploration of their capabilities with two different prototypes. In the first version, a resolution of less than 1 µm was shown thanks to a prototype based on an optically downscaled LED using an LED scanning transmission optical microscopy (STOM) technique. This research demonstrates how this technique can be used to improve STOM images by oversampling the acquisition. The second STOM-based microscope was fabricated with a 200 nm GaN LED. This demonstrates the possibilities for the miniaturization of on-chip-based microscopes.
topic CMOS sensor
nano-LED
optical downscaling
nanopositioners
miniaturization
url https://www.mdpi.com/1424-8220/21/10/3305
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