APA (7th ed.) Citation

Chao, Y., Yang, K., Su, C., Lin, C., & King, Y. (2021). Wide range detector of plasma induced charging effect for advanced CMOS BEOL processes. SpringerOpen.

Chicago Style (17th ed.) Citation

Chao, Yi-Jie, Kai-Wei Yang, Chi Su, Chrong-Jung Lin, and Ya-Chin King. Wide Range Detector of Plasma Induced Charging Effect for Advanced CMOS BEOL Processes. SpringerOpen, 2021.

MLA (8th ed.) Citation

Chao, Yi-Jie, et al. Wide Range Detector of Plasma Induced Charging Effect for Advanced CMOS BEOL Processes. SpringerOpen, 2021.