MEMS Mirrors for LiDAR: A review
In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds...
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doaj-211c3383ff5748968acf2321fb050ed22020-11-25T02:26:29ZengMDPI AGMicromachines2072-666X2020-04-011145645610.3390/mi11050456MEMS Mirrors for LiDAR: A reviewDingkang Wang0Connor Watkins1Huikai Xie2Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USADepartment of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USADepartment of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USAIn recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given.https://www.mdpi.com/2072-666X/11/5/456LiDARoptical scannerlaser scanningmems mirrormicromirror |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Dingkang Wang Connor Watkins Huikai Xie |
spellingShingle |
Dingkang Wang Connor Watkins Huikai Xie MEMS Mirrors for LiDAR: A review Micromachines LiDAR optical scanner laser scanning mems mirror micromirror |
author_facet |
Dingkang Wang Connor Watkins Huikai Xie |
author_sort |
Dingkang Wang |
title |
MEMS Mirrors for LiDAR: A review |
title_short |
MEMS Mirrors for LiDAR: A review |
title_full |
MEMS Mirrors for LiDAR: A review |
title_fullStr |
MEMS Mirrors for LiDAR: A review |
title_full_unstemmed |
MEMS Mirrors for LiDAR: A review |
title_sort |
mems mirrors for lidar: a review |
publisher |
MDPI AG |
series |
Micromachines |
issn |
2072-666X |
publishDate |
2020-04-01 |
description |
In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention both in academia and industry because of the increasing demand for autonomous vehicles. LiDAR is believed to be the crucial sensor for autonomous driving and flying, as it can provide high-density point clouds with accurate three-dimensional information. This review presents an extensive overview of Microelectronechanical Systems (MEMS) scanning mirrors specifically for applications in LiDAR systems. MEMS mirror-based laser scanners have unrivalled advantages in terms of size, speed and cost over other types of laser scanners, making them ideal for LiDAR in a wide range of applications. A figure of merit (FoM) is defined for MEMS mirrors in LiDAR scanners in terms of aperture size, field of view (FoV) and resonant frequency. Various MEMS mirrors based on different actuation mechanisms are compared using the FoM. Finally, a preliminary assessment of off-the-shelf MEMS scanned LiDAR systems is given. |
topic |
LiDAR optical scanner laser scanning mems mirror micromirror |
url |
https://www.mdpi.com/2072-666X/11/5/456 |
work_keys_str_mv |
AT dingkangwang memsmirrorsforlidarareview AT connorwatkins memsmirrorsforlidarareview AT huikaixie memsmirrorsforlidarareview |
_version_ |
1724846738949275648 |