Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition
In this paper, we synthesize carbon nanotubes (CNTs) by using atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD). In AMPCVD, a coaxial plasma generator provides 200 W 2.45 GHz microwave plasma at atmospheric pressure to decompose the precursor. A high-temperature tube furnace p...
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doaj-219fb7fac3724800858f58c9131043ef2020-11-25T03:11:12ZengMDPI AGApplied Sciences2076-34172020-06-01104468446810.3390/app10134468Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor DepositionDashuai Li0Ling Tong1Bo Gao2School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaIn this paper, we synthesize carbon nanotubes (CNTs) by using atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD). In AMPCVD, a coaxial plasma generator provides 200 W 2.45 GHz microwave plasma at atmospheric pressure to decompose the precursor. A high-temperature tube furnace provides a suitable growth temperature for the deposition of CNTs. Optical fiber spectroscopy was used to measure the compositions of the argon–ethanol–hydrogen plasma. A comparative experiment of ethanol precursor decomposition, with and without plasma, was carried out to measure the role of the microwave plasma, showing that the 200 W microwave plasma can decompose 99% of ethanol precursor at any furnace temperature. CNTs were prepared on a stainless steel substrate by using the technology to decompose ethanol with the plasma power of 200 W at the temperatures of 500, 600, 700, and 800 °C; CNT growth increases with the increase in temperature. Prepared CNTs, analyzed by SEM and HRTEM, were shown to be multiwalled and tangled with each other. The measurement of XPS and Raman spectroscopy indicates that many oxygenated functional groups have attached to the surface of the CNTs.https://www.mdpi.com/2076-3417/10/13/4468microwave plasmaAMPCVDCNTs |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Dashuai Li Ling Tong Bo Gao |
spellingShingle |
Dashuai Li Ling Tong Bo Gao Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition Applied Sciences microwave plasma AMPCVD CNTs |
author_facet |
Dashuai Li Ling Tong Bo Gao |
author_sort |
Dashuai Li |
title |
Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition |
title_short |
Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition |
title_full |
Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition |
title_fullStr |
Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition |
title_full_unstemmed |
Synthesis of Multiwalled Carbon Nanotubes on Stainless Steel by Atmospheric Pressure Microwave Plasma Chemical Vapor Deposition |
title_sort |
synthesis of multiwalled carbon nanotubes on stainless steel by atmospheric pressure microwave plasma chemical vapor deposition |
publisher |
MDPI AG |
series |
Applied Sciences |
issn |
2076-3417 |
publishDate |
2020-06-01 |
description |
In this paper, we synthesize carbon nanotubes (CNTs) by using atmospheric pressure microwave plasma chemical vapor deposition (AMPCVD). In AMPCVD, a coaxial plasma generator provides 200 W 2.45 GHz microwave plasma at atmospheric pressure to decompose the precursor. A high-temperature tube furnace provides a suitable growth temperature for the deposition of CNTs. Optical fiber spectroscopy was used to measure the compositions of the argon–ethanol–hydrogen plasma. A comparative experiment of ethanol precursor decomposition, with and without plasma, was carried out to measure the role of the microwave plasma, showing that the 200 W microwave plasma can decompose 99% of ethanol precursor at any furnace temperature. CNTs were prepared on a stainless steel substrate by using the technology to decompose ethanol with the plasma power of 200 W at the temperatures of 500, 600, 700, and 800 °C; CNT growth increases with the increase in temperature. Prepared CNTs, analyzed by SEM and HRTEM, were shown to be multiwalled and tangled with each other. The measurement of XPS and Raman spectroscopy indicates that many oxygenated functional groups have attached to the surface of the CNTs. |
topic |
microwave plasma AMPCVD CNTs |
url |
https://www.mdpi.com/2076-3417/10/13/4468 |
work_keys_str_mv |
AT dashuaili synthesisofmultiwalledcarbonnanotubesonstainlesssteelbyatmosphericpressuremicrowaveplasmachemicalvapordeposition AT lingtong synthesisofmultiwalledcarbonnanotubesonstainlesssteelbyatmosphericpressuremicrowaveplasmachemicalvapordeposition AT bogao synthesisofmultiwalledcarbonnanotubesonstainlesssteelbyatmosphericpressuremicrowaveplasmachemicalvapordeposition |
_version_ |
1724655438330331136 |