MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam

MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam

Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was e...

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Bibliographic Details
Main Authors: Shahriar Kouravand, Ghader Rezazadeh, Mehdi Sabet, Ahmadali Tahmasebi
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2006-08-01
Series:Sensors & Transducers
Subjects:
micro thermometer
bimetal
cantilever
capacitance
Online Access:http://www.sensorsportal.com/HTML/DIGEST/august_06/P_76.pdf
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spelling doaj-21b75a212cf946abbf96e59240101d302020-11-24T23:08:21ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792006-08-01708637644MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever BeamShahriar Kouravand0Ghader Rezazadeh1Mehdi Sabet2Ahmadali Tahmasebi3Mech. Eng. Dept. Urmia University, Urmia, IranMech. Eng. Dept. Urmia University, Urmia, IRANMech. Eng. Dept. Urmia University, Urmia, IRANMech. Eng. Dept. Urmia University, Urmia, IRANThermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.http://www.sensorsportal.com/HTML/DIGEST/august_06/P_76.pdfmicro thermometerbimetalcantilevercapacitance
collection DOAJ
language English
format Article
sources DOAJ
author Shahriar Kouravand
Ghader Rezazadeh
Mehdi Sabet
Ahmadali Tahmasebi
spellingShingle Shahriar Kouravand
Ghader Rezazadeh
Mehdi Sabet
Ahmadali Tahmasebi
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
Sensors & Transducers
micro thermometer
bimetal
cantilever
capacitance
author_facet Shahriar Kouravand
Ghader Rezazadeh
Mehdi Sabet
Ahmadali Tahmasebi
author_sort Shahriar Kouravand
title MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
title_short MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
title_full MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
title_fullStr MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
title_full_unstemmed MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
title_sort mems capacitive micro thermometer based on tip deflection of bimetallic cantilever beam
publisher IFSA Publishing, S.L.
series Sensors & Transducers
issn 2306-8515
1726-5479
publishDate 2006-08-01
description Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.
topic micro thermometer
bimetal
cantilever
capacitance
url http://www.sensorsportal.com/HTML/DIGEST/august_06/P_76.pdf
work_keys_str_mv AT shahriarkouravand memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam
AT ghaderrezazadeh memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam
AT mehdisabet memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam
AT ahmadalitahmasebi memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam
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