MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam
Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was e...
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doaj-21b75a212cf946abbf96e59240101d302020-11-24T23:08:21ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792006-08-01708637644MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever BeamShahriar Kouravand0Ghader Rezazadeh1Mehdi Sabet2Ahmadali Tahmasebi3Mech. Eng. Dept. Urmia University, Urmia, IranMech. Eng. Dept. Urmia University, Urmia, IRANMech. Eng. Dept. Urmia University, Urmia, IRANMech. Eng. Dept. Urmia University, Urmia, IRANThermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results.http://www.sensorsportal.com/HTML/DIGEST/august_06/P_76.pdfmicro thermometerbimetalcantilevercapacitance |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Shahriar Kouravand Ghader Rezazadeh Mehdi Sabet Ahmadali Tahmasebi |
spellingShingle |
Shahriar Kouravand Ghader Rezazadeh Mehdi Sabet Ahmadali Tahmasebi MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam Sensors & Transducers micro thermometer bimetal cantilever capacitance |
author_facet |
Shahriar Kouravand Ghader Rezazadeh Mehdi Sabet Ahmadali Tahmasebi |
author_sort |
Shahriar Kouravand |
title |
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam |
title_short |
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam |
title_full |
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam |
title_fullStr |
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam |
title_full_unstemmed |
MEMS Capacitive Micro Thermometer Based on Tip Deflection of Bimetallic Cantilever Beam |
title_sort |
mems capacitive micro thermometer based on tip deflection of bimetallic cantilever beam |
publisher |
IFSA Publishing, S.L. |
series |
Sensors & Transducers |
issn |
2306-8515 1726-5479 |
publishDate |
2006-08-01 |
description |
Thermometry is an interested field in physics and metrology. A capacitive micro thermometer based on the tip deflection of bimetallic cantilever beam was designed and described in this paper. The governing thermo mechanical equations were derived and solved analytically. The temperature rising was expressed with respect to capacitance change of a comb drive. The results of beam deflection were compared well with the existing results. |
topic |
micro thermometer bimetal cantilever capacitance |
url |
http://www.sensorsportal.com/HTML/DIGEST/august_06/P_76.pdf |
work_keys_str_mv |
AT shahriarkouravand memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam AT ghaderrezazadeh memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam AT mehdisabet memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam AT ahmadalitahmasebi memscapacitivemicrothermometerbasedontipdeflectionofbimetalliccantileverbeam |
_version_ |
1725614717418864640 |