An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

We demonstrate the hybrid integration of a lithium niobate microring resonator with a silicon nitride waveguide in the vertical configuration to achieve efficient light coupling. The microring resonator is fabricated on a lithium niobate on insulator (LNOI) substrate using photolithography assisted...

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Bibliographic Details
Main Authors: Jianhao Zhang, Rongbo Wu, Min Wang, Youting Liang, Junxia Zhou, Miao Wu, Zhiwei Fang, Wei Chu, Ya Cheng
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Micromachines
Subjects:
lithium niobate microring resonator
silicon nitride waveguide
photolithography assisted chemo-mechanical etching
Online Access:https://www.mdpi.com/2072-666X/12/3/235

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