Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator
Design optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretical...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2014-12-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/6/1/151 |
| id |
doaj-21eabba1df2e47a2ad4b28f0ba5ba997 |
|---|---|
| record_format |
Article |
| spelling |
doaj-21eabba1df2e47a2ad4b28f0ba5ba9972020-11-25T01:10:33ZengMDPI AGMicromachines2072-666X2014-12-016115115910.3390/mi6010151mi6010151Optimisation Design of Coupling Region Based on SOI Micro-Ring ResonatorShubin Yan0Minghui Li1Liang Luo2Kezhen Ma3Chenyang Xue4Wendong Zhang5Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, ChinaScience and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, Shanxi, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Shanxi, ChinaDesign optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretically analyzed. Resonators (R = 100 μm) with different coupling styles, concentric, straight, and butterfly, are prepared by the micro-electro-mechanical-systems (MEMS) process. Coupling experimental results show that micro-cavity of butterfly-coupled style obtains the narrowest (3 dB) bandwidth, and the quality factor has been greatly improved. The results provide the foundation for realization of a large size, high-Q resonator, and its development and application in the integrated optical gyroscopes, filters, sensors, and other related fields.http://www.mdpi.com/2072-666X/6/1/151integrated opticsresonatorquality factorcoupling designcoupling test |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Shubin Yan Minghui Li Liang Luo Kezhen Ma Chenyang Xue Wendong Zhang |
| spellingShingle |
Shubin Yan Minghui Li Liang Luo Kezhen Ma Chenyang Xue Wendong Zhang Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator Micromachines integrated optics resonator quality factor coupling design coupling test |
| author_facet |
Shubin Yan Minghui Li Liang Luo Kezhen Ma Chenyang Xue Wendong Zhang |
| author_sort |
Shubin Yan |
| title |
Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator |
| title_short |
Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator |
| title_full |
Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator |
| title_fullStr |
Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator |
| title_full_unstemmed |
Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator |
| title_sort |
optimisation design of coupling region based on soi micro-ring resonator |
| publisher |
MDPI AG |
| series |
Micromachines |
| issn |
2072-666X |
| publishDate |
2014-12-01 |
| description |
Design optimization of the coupling region is conducted in order to solve the difficulty of achieving a higher quality factor (Q) for large size resonators based on silicon-on-insulator (SOI). Relations among coupling length, coupling ratio and quality factor of the optical cavities are theoretically analyzed. Resonators (R = 100 μm) with different coupling styles, concentric, straight, and butterfly, are prepared by the micro-electro-mechanical-systems (MEMS) process. Coupling experimental results show that micro-cavity of butterfly-coupled style obtains the narrowest (3 dB) bandwidth, and the quality factor has been greatly improved. The results provide the foundation for realization of a large size, high-Q resonator, and its development and application in the integrated optical gyroscopes, filters, sensors, and other related fields. |
| topic |
integrated optics resonator quality factor coupling design coupling test |
| url |
http://www.mdpi.com/2072-666X/6/1/151 |
| work_keys_str_mv |
AT shubinyan optimisationdesignofcouplingregionbasedonsoimicroringresonator AT minghuili optimisationdesignofcouplingregionbasedonsoimicroringresonator AT liangluo optimisationdesignofcouplingregionbasedonsoimicroringresonator AT kezhenma optimisationdesignofcouplingregionbasedonsoimicroringresonator AT chenyangxue optimisationdesignofcouplingregionbasedonsoimicroringresonator AT wendongzhang optimisationdesignofcouplingregionbasedonsoimicroringresonator |
| _version_ |
1725174002945622016 |