A Monte Carlo Method for Low Pressure Radio Frequency Discharges
There is increasing interest in glow discharges because of their importance to a large number of application fields, like the microelectronics industry, flat plasma display panel technology, the laser and light industry and analytical spectrochemistry. To improve the capabilities of rf glow discharg...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sultan Qaboos University
2003-06-01
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| Series: | Sultan Qaboos University Journal for Science |
| Subjects: | |
| Online Access: | https://journals.squ.edu.om/index.php/squjs/article/view/307 |
