Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets

Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets

High carbon-rich boroncarbonitride thin films have been grown by pulsed laser deposition (PLD) technique with using BN-C dual-targets. Fourier-transform infrared (FTIR) spectroscopy results presented B-N, B-C and C-N bonds, indicating the as-deposited thin films were new ternary compounds. B-N, B-C...

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Main Authors: Song Zhang, Jun Wu, Qiong Yang, Rong Tu, Chuanbin Wang, Qiang Shen, Lianmeng Zhang
Format: Article
Language:English
Published: AIP Publishing LLC 2015-04-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4918684
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spelling doaj-2aea3744fbb841e9916c7a6ebf8127542020-11-25T01:17:12ZengAIP Publishing LLCAIP Advances2158-32262015-04-0154047125047125-610.1063/1.4918684026504ADVStoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targetsSong Zhang0Jun Wu1Qiong Yang2Rong Tu3Chuanbin Wang4Qiang Shen5Lianmeng Zhang6State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaState Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, 122 Luoshi Road, Wuhan 430070, People’s Republic of ChinaHigh carbon-rich boroncarbonitride thin films have been grown by pulsed laser deposition (PLD) technique with using BN-C dual-targets. Fourier-transform infrared (FTIR) spectroscopy results presented B-N, B-C and C-N bonds, indicating the as-deposited thin films were new ternary compounds. B-N, B-C and C-N bonding structures were also detected by X-ray photoelectron spectroscopy (XPS), and carbon content fell into a large range of 45.8 to 85.9%. The films exhibited good thermalstability in vacuum, whereas were oxidized at 600 oC in air.http://dx.doi.org/10.1063/1.4918684
collection DOAJ
language English
format Article
sources DOAJ
author Song Zhang
Jun Wu
Qiong Yang
Rong Tu
Chuanbin Wang
Qiang Shen
Lianmeng Zhang
spellingShingle Song Zhang
Jun Wu
Qiong Yang
Rong Tu
Chuanbin Wang
Qiang Shen
Lianmeng Zhang
Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
AIP Advances
author_facet Song Zhang
Jun Wu
Qiong Yang
Rong Tu
Chuanbin Wang
Qiang Shen
Lianmeng Zhang
author_sort Song Zhang
title Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
title_short Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
title_full Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
title_fullStr Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
title_full_unstemmed Stoichiometric controlling of boroncarbonitride thin films with using BN-C dual-targets
title_sort stoichiometric controlling of boroncarbonitride thin films with using bn-c dual-targets
publisher AIP Publishing LLC
series AIP Advances
issn 2158-3226
publishDate 2015-04-01
description High carbon-rich boroncarbonitride thin films have been grown by pulsed laser deposition (PLD) technique with using BN-C dual-targets. Fourier-transform infrared (FTIR) spectroscopy results presented B-N, B-C and C-N bonds, indicating the as-deposited thin films were new ternary compounds. B-N, B-C and C-N bonding structures were also detected by X-ray photoelectron spectroscopy (XPS), and carbon content fell into a large range of 45.8 to 85.9%. The films exhibited good thermalstability in vacuum, whereas were oxidized at 600 oC in air.
url http://dx.doi.org/10.1063/1.4918684
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AT rongtu stoichiometriccontrollingofboroncarbonitridethinfilmswithusingbncdualtargets
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AT qiangshen stoichiometriccontrollingofboroncarbonitridethinfilmswithusingbncdualtargets
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