A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning

A Planar Laser Diffraction Encoder in Littrow Configuration for 2D Nanometric Positioning

This paper presents a novel design of a planar encoder based on the principle of diffractive interferometry. The system is capable of measuring the two-dimensional displacement of the planar grating of any size. It adopts a specially designed optical path that can increase the alignment tolerance be...

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Bibliographic Details
Main Authors: Kuang-Chao Fan, Bor-Cheng Lee, Yi-Cheng Chung
Format: Article
Language:English
Published: Chinese Institute of Automation Engineers (CIAE) & Taiwan Smart Living Space Association (SMART LISA) 2011-12-01
Series:International Journal of Automation and Smart Technology
Subjects:
Planar encoder, Diffractive interferometer, Planar gratings, Waveform errors.
Online Access:http://www.ausmt.org/index.php/AUSMT/article/view/53

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