Effect of Co-doped Concentration on Microstructure and Photoelectric Properties of Na-Al Co-doped ZnO Thin Films

• Main Authors: CHEN Yi-chuan, HU Yue-hui, HU Ke-yan, ZHANG Xiao-hua, TONG Fan, SHUAI Wei-qiang, LAO Zi-xuan
• Format: Article
• Language: zho
• Published: Journal of Materials Engineering 2018-06-01
• Series: Journal of Materials Engineering
• Subjects: ZnO; sol-gel; Na-Al co-doped; microstructure; optical property
• Online Access: http://jme.biam.ac.cn/CN/Y2018/V46/I6/51

Sodium and aluminum (Na-Al) co-doped ZnO thin films (NAZO) were prepared on the quartz glass substrate by sol-gel spin-coating method. The effect of different Na-Al co-doped concentration on crystallization, microstructure and photoelectric properties of ZnO films were investigated. The results show that all NAZO thin films samples grow along the <i>c</i>-axis of the preferred orientation; appropriate Na-Al co-doped concentration can improve the ZnO films crystallization, increase the carrier mobility; meanwhile, six columnar grain structure crystal particles can be observed on the NAZO films surface. With the changing of Na-Al co-doped concentration, the highest mean optical transmittance reaches 95%. Because of the difference of the solid solution ratio, the appropriate concentration can improve the efficiency of doping Na-Al element, which enhances the carrier concentration of the film inside and the resistivity decreases; the lowest resistivity of NAZO thin films is 4.7&#215;10^-2Ω&#183;cm.