Fabrication of ultrahigh-density nanowires by electrochemical nanolithography

Fabrication of ultrahigh-density nanowires by electrochemical nanolithography

<p>Abstract</p> <p>An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 &#215; 10<sup>11 </sup>cm<sup>-2 </sup>with g...

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Main Authors: Jiang Hongquan, Kiefer Arnold, Clausen Anna, Ting Yuk-Hong, Wendt Amy, Lagally Max, Chen Feng, Ding Bingjun
Format: Article
Language:English
Published: SpringerOpen 2011-01-01
Series:Nanoscale Research Letters
Online Access:http://www.nanoscalereslett.com/content/6/1/444
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spelling doaj-2c86e3f017b24ff68cf0f92d4a0adc1f2020-11-24T21:52:39ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2011-01-0161444Fabrication of ultrahigh-density nanowires by electrochemical nanolithographyJiang HongquanKiefer ArnoldClausen AnnaTing Yuk-HongWendt AmyLagally MaxChen FengDing Bingjun<p>Abstract</p> <p>An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 &#215; 10<sup>11 </sup>cm<sup>-2 </sup>with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.</p> http://www.nanoscalereslett.com/content/6/1/444
collection DOAJ
language English
format Article
sources DOAJ
author Jiang Hongquan
Kiefer Arnold
Clausen Anna
Ting Yuk-Hong
Wendt Amy
Lagally Max
Chen Feng
Ding Bingjun
spellingShingle Jiang Hongquan
Kiefer Arnold
Clausen Anna
Ting Yuk-Hong
Wendt Amy
Lagally Max
Chen Feng
Ding Bingjun
Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
Nanoscale Research Letters
author_facet Jiang Hongquan
Kiefer Arnold
Clausen Anna
Ting Yuk-Hong
Wendt Amy
Lagally Max
Chen Feng
Ding Bingjun
author_sort Jiang Hongquan
title Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
title_short Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
title_full Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
title_fullStr Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
title_full_unstemmed Fabrication of ultrahigh-density nanowires by electrochemical nanolithography
title_sort fabrication of ultrahigh-density nanowires by electrochemical nanolithography
publisher SpringerOpen
series Nanoscale Research Letters
issn 1931-7573
1556-276X
publishDate 2011-01-01
description <p>Abstract</p> <p>An approach has been developed to produce silver nanoparticles (AgNPs) rapidly on semiconductor wafers using electrochemical deposition. The closely packed AgNPs have a density of up to 1.4 &#215; 10<sup>11 </sup>cm<sup>-2 </sup>with good size uniformity. AgNPs retain their shape and position on the substrate when used as nanomasks for producing ultrahigh-density vertical nanowire arrays with controllable size, making it a one-step nanolithography technique. We demonstrate this method on Si/SiGe multilayer superlattices using electrochemical nanopatterning and plasma etching to obtain high-density Si/SiGe multilayer superlattice nanowires.</p>
url http://www.nanoscalereslett.com/content/6/1/444
work_keys_str_mv AT jianghongquan fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT kieferarnold fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT clausenanna fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT tingyukhong fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT wendtamy fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT lagallymax fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT chenfeng fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
AT dingbingjun fabricationofultrahighdensitynanowiresbyelectrochemicalnanolithography
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