Spectrophotometric determination of optical parameters of lithium niobate films
Lithium niobate films on silicon substrates have been synthesized by high-frequency magnetron sputtering of a target. The spectral dependences of the reflectance in the 300–700 nm range at small incidence angles and the angular dependence of p- and s-polarized light for a discrete set of wavelengths...
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doaj-2d3e3eafd6da45adbcf530ce2724bcba2021-04-02T08:57:04ZengPensoft PublishersModern Electronic Materials2452-17792017-09-013312212610.1016/j.moem.2017.09.001Spectrophotometric determination of optical parameters of lithium niobate filmsNina S. Kozlova0Vladimir R. Shayapov1Evgeniya V. Zabelina2Anna P. Kozlova3Roman N. Zhukov4Dmitry A. Kiselev5Mikhail D. Malinkovich6Marina I. Voronova7National University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaNikolaev Institute of Inorganic Chemistry SB RAS, 3 Acad. Lavrentiev Ave., Novosibirsk 630090, RussiaNational University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaNational University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaNational University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaNational University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaNational University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaNational University of Science and Technology MISiS, 4 Leninsky Prospekt, Moscow 119049, RussiaLithium niobate films on silicon substrates have been synthesized by high-frequency magnetron sputtering of a target. The spectral dependences of the reflectance in the 300–700 nm range at small incidence angles and the angular dependence of p- and s-polarized light for a discrete set of wavelengths from 300 to 700 nm with wavelength increments of 50 nm, for angles of 1 arc deg, have been obtained using spectrophotometry. The refractive indicies, the film thickness and the extinction coefficients have been determined using a numerical method for solving inverse problems. The initial approximations for the solution of inverse problems have been defined using methods based on the estimation of the interference extrema positions in the reflection spectra. The resultant refractive indicies of the film differ from those typical of LiNbO3 single crystals. These differences are attributed to the structural disorder induced by the predominant crystallite orientation and the absorption in the film.http://www.sciencedirect.com/science/article/pii/S2452177917300567Lithium niobateFilmslReflection specrtophotometryRefractive indexExtinction coefficientDispersion |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Nina S. Kozlova Vladimir R. Shayapov Evgeniya V. Zabelina Anna P. Kozlova Roman N. Zhukov Dmitry A. Kiselev Mikhail D. Malinkovich Marina I. Voronova |
spellingShingle |
Nina S. Kozlova Vladimir R. Shayapov Evgeniya V. Zabelina Anna P. Kozlova Roman N. Zhukov Dmitry A. Kiselev Mikhail D. Malinkovich Marina I. Voronova Spectrophotometric determination of optical parameters of lithium niobate films Modern Electronic Materials Lithium niobate Filmsl Reflection specrtophotometry Refractive index Extinction coefficient Dispersion |
author_facet |
Nina S. Kozlova Vladimir R. Shayapov Evgeniya V. Zabelina Anna P. Kozlova Roman N. Zhukov Dmitry A. Kiselev Mikhail D. Malinkovich Marina I. Voronova |
author_sort |
Nina S. Kozlova |
title |
Spectrophotometric determination of optical parameters of lithium niobate films |
title_short |
Spectrophotometric determination of optical parameters of lithium niobate films |
title_full |
Spectrophotometric determination of optical parameters of lithium niobate films |
title_fullStr |
Spectrophotometric determination of optical parameters of lithium niobate films |
title_full_unstemmed |
Spectrophotometric determination of optical parameters of lithium niobate films |
title_sort |
spectrophotometric determination of optical parameters of lithium niobate films |
publisher |
Pensoft Publishers |
series |
Modern Electronic Materials |
issn |
2452-1779 |
publishDate |
2017-09-01 |
description |
Lithium niobate films on silicon substrates have been synthesized by high-frequency magnetron sputtering of a target. The spectral dependences of the reflectance in the 300–700 nm range at small incidence angles and the angular dependence of p- and s-polarized light for a discrete set of wavelengths from 300 to 700 nm with wavelength increments of 50 nm, for angles of 1 arc deg, have been obtained using spectrophotometry. The refractive indicies, the film thickness and the extinction coefficients have been determined using a numerical method for solving inverse problems. The initial approximations for the solution of inverse problems have been defined using methods based on the estimation of the interference extrema positions in the reflection spectra. The resultant refractive indicies of the film differ from those typical of LiNbO3 single crystals. These differences are attributed to the structural disorder induced by the predominant crystallite orientation and the absorption in the film. |
topic |
Lithium niobate Filmsl Reflection specrtophotometry Refractive index Extinction coefficient Dispersion |
url |
http://www.sciencedirect.com/science/article/pii/S2452177917300567 |
work_keys_str_mv |
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1724169979848294400 |