Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors
Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabr...
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doaj-2f1ce525129d4676afd3f5504d25b0822020-11-25T03:06:47ZengMDPI AGApplied Sciences2076-34172020-09-01106191619110.3390/app10186191Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement MirrorsYi-Chieh Shih0Pi-Cheng Tung1Wen-Yuh Jywe2Chung-Ping Chang3Lih-Horng Shyu4Tung-Hsien Hsieh5Department of Mechanical Engineering, National Central University, Taoyuan 320, TaiwanDepartment of Mechanical Engineering, National Central University, Taoyuan 320, TaiwanSmart Machinery and Intelligent Manufacturing Research Center, National Formosa University, Yunlin 632, TaiwanDepartment of Mechanical and Energy Engineering, National Chiayi University, Chiayi 600, TaiwanDepartment of Electro-Optical Engineering, National Formosa University, Yunlin 632, TaiwanSmart Machinery and Intelligent Manufacturing Research Center, National Formosa University, Yunlin 632, TaiwanDue to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabry–Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry–Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry–Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry–Pérot interferometer is feasible for precise displacement measurement.https://www.mdpi.com/2076-3417/10/18/6191differential Fabry–Pérot interferometerhomodyne interferometernonlinearity errorlinear displacement |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Yi-Chieh Shih Pi-Cheng Tung Wen-Yuh Jywe Chung-Ping Chang Lih-Horng Shyu Tung-Hsien Hsieh |
spellingShingle |
Yi-Chieh Shih Pi-Cheng Tung Wen-Yuh Jywe Chung-Ping Chang Lih-Horng Shyu Tung-Hsien Hsieh Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors Applied Sciences differential Fabry–Pérot interferometer homodyne interferometer nonlinearity error linear displacement |
author_facet |
Yi-Chieh Shih Pi-Cheng Tung Wen-Yuh Jywe Chung-Ping Chang Lih-Horng Shyu Tung-Hsien Hsieh |
author_sort |
Yi-Chieh Shih |
title |
Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors |
title_short |
Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors |
title_full |
Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors |
title_fullStr |
Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors |
title_full_unstemmed |
Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors |
title_sort |
investigation on the differential quadrature fabry–pérot interferometer with variable measurement mirrors |
publisher |
MDPI AG |
series |
Applied Sciences |
issn |
2076-3417 |
publishDate |
2020-09-01 |
description |
Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabry–Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry–Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry–Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry–Pérot interferometer is feasible for precise displacement measurement. |
topic |
differential Fabry–Pérot interferometer homodyne interferometer nonlinearity error linear displacement |
url |
https://www.mdpi.com/2076-3417/10/18/6191 |
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