Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...
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2015-09-01
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doaj-30baa87075164fa68dc825113883fa602020-11-25T01:30:57ZengMDPI AGSensors1424-82202015-09-01159232052321710.3390/s150923205s150923205Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging ApplicationsJinlong Song0Chenyang Xue1Changde He2Rui Zhang3Linfeng Mu4Juan Cui5Jing Miao6Yuan Liu7Wendong Zhang8Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaA capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20 excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.http://www.mdpi.com/1424-8220/15/9/23205CMUTC-V characteristic curvesound pressurebandwidthultrasonic imaging |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Jinlong Song Chenyang Xue Changde He Rui Zhang Linfeng Mu Juan Cui Jing Miao Yuan Liu Wendong Zhang |
spellingShingle |
Jinlong Song Chenyang Xue Changde He Rui Zhang Linfeng Mu Juan Cui Jing Miao Yuan Liu Wendong Zhang Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications Sensors CMUT C-V characteristic curve sound pressure bandwidth ultrasonic imaging |
author_facet |
Jinlong Song Chenyang Xue Changde He Rui Zhang Linfeng Mu Juan Cui Jing Miao Yuan Liu Wendong Zhang |
author_sort |
Jinlong Song |
title |
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications |
title_short |
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications |
title_full |
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications |
title_fullStr |
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications |
title_full_unstemmed |
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications |
title_sort |
capacitive micromachined ultrasonic transducers (cmuts) for underwater imaging applications |
publisher |
MDPI AG |
series |
Sensors |
issn |
1424-8220 |
publishDate |
2015-09-01 |
description |
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20 excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system. |
topic |
CMUT C-V characteristic curve sound pressure bandwidth ultrasonic imaging |
url |
http://www.mdpi.com/1424-8220/15/9/23205 |
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