Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...

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Main Authors: Jinlong Song, Chenyang Xue, Changde He, Rui Zhang, Linfeng Mu, Juan Cui, Jing Miao, Yuan Liu, Wendong Zhang
Format: Article
Language:English
Published: MDPI AG 2015-09-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/15/9/23205
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spelling doaj-30baa87075164fa68dc825113883fa602020-11-25T01:30:57ZengMDPI AGSensors1424-82202015-09-01159232052321710.3390/s150923205s150923205Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging ApplicationsJinlong Song0Chenyang Xue1Changde He2Rui Zhang3Linfeng Mu4Juan Cui5Jing Miao6Yuan Liu7Wendong Zhang8Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, ChinaA capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.http://www.mdpi.com/1424-8220/15/9/23205CMUTC-V characteristic curvesound pressurebandwidthultrasonic imaging
collection DOAJ
language English
format Article
sources DOAJ
author Jinlong Song
Chenyang Xue
Changde He
Rui Zhang
Linfeng Mu
Juan Cui
Jing Miao
Yuan Liu
Wendong Zhang
spellingShingle Jinlong Song
Chenyang Xue
Changde He
Rui Zhang
Linfeng Mu
Juan Cui
Jing Miao
Yuan Liu
Wendong Zhang
Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
Sensors
CMUT
C-V characteristic curve
sound pressure
bandwidth
ultrasonic imaging
author_facet Jinlong Song
Chenyang Xue
Changde He
Rui Zhang
Linfeng Mu
Juan Cui
Jing Miao
Yuan Liu
Wendong Zhang
author_sort Jinlong Song
title Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
title_short Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
title_full Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
title_fullStr Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
title_full_unstemmed Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
title_sort capacitive micromachined ultrasonic transducers (cmuts) for underwater imaging applications
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2015-09-01
description A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance-voltage (C-V) characteristic curve shows that the transducer offers suitable levels of hysteresis and repeatability performance. The −6 dB center frequency is 540 kHz and the transducer has a bandwidth of 840 kHz for a relative bandwidth of 155%. Underwater pressure of 143.43 Pa is achieved 1 m away from the capacitive micromachined ultrasonic transducer under 20  excitation. Two-dimensional underwater ultrasonic imaging, which is able to prove that a rectangular object is present underwater, is achieved. The results presented here indicate that our work will be highly beneficial for the establishment of an underwater ultrasonic imaging system.
topic CMUT
C-V characteristic curve
sound pressure
bandwidth
ultrasonic imaging
url http://www.mdpi.com/1424-8220/15/9/23205
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