A Review of MEMS Capacitive Microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

Full description

Bibliographic Details
Main Authors:	Siti Aisyah Zawawi, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis, Faisal Mohd-Yasin
Format:	Article
Language:	English
Published:	MDPI AG 2020-05-01
Series:	Micromachines
Subjects:	micro-electro-mechanical system (MEMS) capacitive microphone condenser microphone acoustic sensor evolution
Online Access:	https://www.mdpi.com/2072-666X/11/5/484

id	doaj-30bfebdf453d4615b50599e301f7dea0
record_format	Article
spelling	doaj-30bfebdf453d4615b50599e301f7dea02020-11-25T03:10:25ZengMDPI AGMicromachines2072-666X2020-05-011148448410.3390/mi11050484A Review of MEMS Capacitive MicrophonesSiti Aisyah Zawawi0Azrul Azlan Hamzah1Burhanuddin Yeop Majlis2Faisal Mohd-Yasin3Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, MalaysiaInstitute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, MalaysiaInstitute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, MalaysiaQueensland Micro- and Nanotechnology Centre, Griffith University, Brisbane, QLD 4111, AustraliaThis review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.https://www.mdpi.com/2072-666X/11/5/484micro-electro-mechanical system (MEMS)capacitive microphonecondenser microphoneacoustic sensorevolution
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin
spellingShingle	Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin A Review of MEMS Capacitive Microphones Micromachines micro-electro-mechanical system (MEMS) capacitive microphone condenser microphone acoustic sensor evolution
author_facet	Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin
author_sort	Siti Aisyah Zawawi
title	A Review of MEMS Capacitive Microphones
title_short	A Review of MEMS Capacitive Microphones
title_full	A Review of MEMS Capacitive Microphones
title_fullStr	A Review of MEMS Capacitive Microphones
title_full_unstemmed	A Review of MEMS Capacitive Microphones
title_sort	review of mems capacitive microphones
publisher	MDPI AG
series	Micromachines
issn	2072-666X
publishDate	2020-05-01
description	This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.
topic	micro-electro-mechanical system (MEMS) capacitive microphone condenser microphone acoustic sensor evolution
url	https://www.mdpi.com/2072-666X/11/5/484
work_keys_str_mv	AT sitiaisyahzawawi areviewofmemscapacitivemicrophones AT azrulazlanhamzah areviewofmemscapacitivemicrophones AT burhanuddinyeopmajlis areviewofmemscapacitivemicrophones AT faisalmohdyasin areviewofmemscapacitivemicrophones AT sitiaisyahzawawi reviewofmemscapacitivemicrophones AT azrulazlanhamzah reviewofmemscapacitivemicrophones AT burhanuddinyeopmajlis reviewofmemscapacitivemicrophones AT faisalmohdyasin reviewofmemscapacitivemicrophones
_version_	1724658714753892352

A Review of MEMS Capacitive Microphones

Similar Items