Merit Function Improvement Method of Thin-Film Thickness Wideband Monitoring System
In the thin-film thickness wideband monitoring system based on merit function, because the transmittance spectrum curve measured deviates from the designed, merit function becomes divergence, which results in the monitoring failure. For improving merit function, beginning from the first layer, the a...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2013-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/november_2013/PDF_vol_158/P_1501.pdf |