Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them un...

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Bibliographic Details
Main Authors:	Chao Xu, Junbo Wang, Deyong Chen, Jian Chen, Wenjie Qi, Bowen Liu, Tian Liang, Xu She
Format:	Article
Language:	English
Published:	MDPI AG 2021-04-01
Series:	Micromachines
Subjects:	temperature compensation electrochemical seismic sensor MEMS thermistor
Online Access:	https://www.mdpi.com/2072-666X/12/4/387

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