Decoration of silicon structures by chemical deposition of nanostructured copper films on porous silicon
The results of experimental study of formation regularities, structural and optical properties of nanostructured copper films chemically deposited on porous silicon from solutions of copper sulfate and hydrofluoric acid are presented. Application of the developed solution for the copper deposition o...
Main Authors: | L. Yu. Roshchin, A. V. Bondarenko |
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Format: | Article |
Language: | Russian |
Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
Subjects: | |
Online Access: | https://doklady.bsuir.by/jour/article/view/888 |
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