Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures

Electrical Conduction Properties of Hydrogenated Amorphous Carbon Films with Different Structures

Hydrogenated amorphous carbon (<i>a</i>-C:H) films have optical and electrical properties that vary widely depending on deposition conditions; however, the electrical conduction mechanism, which is dependent on the film structure, has not yet been fully revealed. To understand the relati...

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Bibliographic Details
Main Authors: Masashi Tomidokoro, Sarayut Tunmee, Ukit Rittihong, Chanan Euaruksakul, Ratchadaporn Supruangnet, Hideki Nakajima, Yuki Hirata, Naoto Ohtake, Hiroki Akasaka
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Materials
Subjects:
hydrogenated amorphous carbon film
electrical conduction
CVD deposition
near-edge X-ray absorption fine structure
variable range hopping
Online Access:https://www.mdpi.com/1996-1944/14/9/2355

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