Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process
In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large dynamic range of reading, which eliminates the...
Main Authors: | Chih-Hsuan Lin, Chao-Hung Song, Kuei-Ann Wen |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-05-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/12/6/635 |
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