The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface
Differences in the values of adhesive forces of interaction between the probe tip of an atomic force microscope and the cleaned surfaces of silicon wafers during their treatment with isopropyl alcohol and distilled water were investigated experimentally. It was shown that the presence of water molec...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Samara National Research University
2019-06-01
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| Series: | Компьютерная оптика |
| Subjects: | |
| Online Access: | http://computeroptics.smr.ru/KO/PDF/KO43-3/430320.pdf |