Carbon Heating Tube Used for Rapid Heating System
We report a microwave heating system with a carbon heating tube (CHT) which was made by a 4-mm diameter quartz tube filled with carbon particles and Ar gas at 1400 Pa. A 60-mm-long CHT was set in a cavity in which 2.45-GHz microwave was introduced. Via nearly complete absorption of a microwave power...
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doaj-3b2825a61a264cffa833b97e8c6f885f2021-03-29T22:39:42ZengIEEEIEEE Access2169-35362019-01-017237982380510.1109/ACCESS.2019.28979818636915Carbon Heating Tube Used for Rapid Heating SystemToshiyuki Sameshima0https://orcid.org/0000-0003-2915-2385Tomoyoshi Miyazaki1Go Kobayashi2Takuji Arima3Toshitaka Kikuchi4Takuma Uehara5Takashi Sugawara6Masahiko Hasumi7Izumi Serizawa8Graduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanGraduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanORC MANUFACTURING Co., Ltd., Chino, JapanGraduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanGraduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanGraduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanGraduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanGraduate School of Engineering, Tokyo University of Agriculture and Technology, Tokyo, JapanORC MANUFACTURING Co., Ltd., Chino, JapanWe report a microwave heating system with a carbon heating tube (CHT) which was made by a 4-mm diameter quartz tube filled with carbon particles and Ar gas at 1400 Pa. A 60-mm-long CHT was set in a cavity in which 2.45-GHz microwave was introduced. Via nearly complete absorption of a microwave power of 200 W by carbon in the CHT during multi-reflection of the microwave in the cavity, the CHT was effectively heated to 1279 °C at 33 s after the microwave initiation, which was observed by the radiation-type thermometer. Moreover, the control of the CHT temperature was demonstrated with a home-made proportional-integral-differential feedback circuit which regulated the magnetron power source using a signal of the thermometer. The control of temperature at 1100 °C was successfully realized. Crystallization of a 58-nm-thick amorphous silicon thin film formed on the glass substrate was demonstrated by mechanically moving the silicon sample just below the heated CHT. A high crystalline volume ratio of 0.92 was achieved. Furthermore, heating of 500-μm-thick-n-type silicon substrate implanted with cm<sup>-2</sup> phosphorus and boron atoms with the CHT resulted in activation of the doped regions. Rectified diode characteristics were achieved.https://ieeexplore.ieee.org/document/8636915/Electromagnetic interferenceheat treatmentlow-microwave power electronicsPID temperature controlsilicon |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Toshiyuki Sameshima Tomoyoshi Miyazaki Go Kobayashi Takuji Arima Toshitaka Kikuchi Takuma Uehara Takashi Sugawara Masahiko Hasumi Izumi Serizawa |
spellingShingle |
Toshiyuki Sameshima Tomoyoshi Miyazaki Go Kobayashi Takuji Arima Toshitaka Kikuchi Takuma Uehara Takashi Sugawara Masahiko Hasumi Izumi Serizawa Carbon Heating Tube Used for Rapid Heating System IEEE Access Electromagnetic interference heat treatment low-microwave power electronics PID temperature control silicon |
author_facet |
Toshiyuki Sameshima Tomoyoshi Miyazaki Go Kobayashi Takuji Arima Toshitaka Kikuchi Takuma Uehara Takashi Sugawara Masahiko Hasumi Izumi Serizawa |
author_sort |
Toshiyuki Sameshima |
title |
Carbon Heating Tube Used for Rapid Heating System |
title_short |
Carbon Heating Tube Used for Rapid Heating System |
title_full |
Carbon Heating Tube Used for Rapid Heating System |
title_fullStr |
Carbon Heating Tube Used for Rapid Heating System |
title_full_unstemmed |
Carbon Heating Tube Used for Rapid Heating System |
title_sort |
carbon heating tube used for rapid heating system |
publisher |
IEEE |
series |
IEEE Access |
issn |
2169-3536 |
publishDate |
2019-01-01 |
description |
We report a microwave heating system with a carbon heating tube (CHT) which was made by a 4-mm diameter quartz tube filled with carbon particles and Ar gas at 1400 Pa. A 60-mm-long CHT was set in a cavity in which 2.45-GHz microwave was introduced. Via nearly complete absorption of a microwave power of 200 W by carbon in the CHT during multi-reflection of the microwave in the cavity, the CHT was effectively heated to 1279 °C at 33 s after the microwave initiation, which was observed by the radiation-type thermometer. Moreover, the control of the CHT temperature was demonstrated with a home-made proportional-integral-differential feedback circuit which regulated the magnetron power source using a signal of the thermometer. The control of temperature at 1100 °C was successfully realized. Crystallization of a 58-nm-thick amorphous silicon thin film formed on the glass substrate was demonstrated by mechanically moving the silicon sample just below the heated CHT. A high crystalline volume ratio of 0.92 was achieved. Furthermore, heating of 500-μm-thick-n-type silicon substrate implanted with cm<sup>-2</sup> phosphorus and boron atoms with the CHT resulted in activation of the doped regions. Rectified diode characteristics were achieved. |
topic |
Electromagnetic interference heat treatment low-microwave power electronics PID temperature control silicon |
url |
https://ieeexplore.ieee.org/document/8636915/ |
work_keys_str_mv |
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