Sputtering of Mo and Al in D2/N2 plasma cleaning discharge
Sputtering of Mo and Al (as Be proxy) in mixed D2/N2 DC glow discharge was studied in view of the first mirror performance. The composition of the working gas was varied from 100% D2 to 100% N2, while keeping a total pressure of 15Pa. The ion energies striking the sample surface were defined by its...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2017-08-01
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Series: | Nuclear Materials and Energy |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2352179116301843 |