Sputtering of Mo and Al in D2/N2 plasma cleaning discharge

Sputtering of Mo and Al in D2/N2 plasma cleaning discharge

Sputtering of Mo and Al (as Be proxy) in mixed D2/N2 DC glow discharge was studied in view of the first mirror performance. The composition of the working gas was varied from 100% D2 to 100% N2, while keeping a total pressure of 15Pa. The ion energies striking the sample surface were defined by its...

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Bibliographic Details
Main Authors: V.L. Bukhovets, A.E. Gorodetsky, R.Kh. Zalavutdinov, A.V. Markin, L.P. Kazansky, I.A. Arkhipushkin, A.P. Zakharov, A.M. Dmitriev, A.G. Razdobarin, E.E. Mukhin
Format: Article
Language:English
Published: Elsevier 2017-08-01
Series:Nuclear Materials and Energy
Online Access:http://www.sciencedirect.com/science/article/pii/S2352179116301843

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