Electrostatic Comb-Drive Actuator with High In-Plane Translational Velocity
This work reports the design and opto-mechanical characterization of high velocity comb-drive actuators producing in-plane motion and fabricated using the technology of deep reactive ion etching (DRIE) of silicon-on-insulator (SOI) substrate. The actuators drive vertical mirrors acting on optical be...
Main Authors: | Yomna M. Eltagoury, Mostafa Soliman, Yasser M. Sabry, Mohammed J. Alotaibi, Diaa Khalil |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-10-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/7/10/188 |
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