Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Abstract In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanoch...

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Bibliographic Details
Main Authors: Jiqiang Wang, Yongda Yan, Yanquan Geng, Yang Gan, Zhuo Fang
Format: Article
Language:English
Published: SpringerOpen 2019-04-01
Series:Nanoscale Research Letters
Subjects:
Atomic force microscopy
Nanomilling
Nanochannels
Nanofluidic chip
Online Access:http://link.springer.com/article/10.1186/s11671-019-2962-6

Internet

http://link.springer.com/article/10.1186/s11671-019-2962-6

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