Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process
Abstract In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanoch...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2019-04-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1186/s11671-019-2962-6 |