New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching

New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching

<p>Abstract</p> <p>We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres. This strategy allows excellent cont...

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Bibliographic Details
Main Authors: Cong Chunxiao, Junus WilliamChandra, Shen Zexiang, Yu Ting
Format: Article
Language:English
Published: SpringerOpen 2009-01-01
Series:Nanoscale Research Letters
Subjects:
Nanosphere lithography
Nanopatterns
Reactive ion etching
Preheating
Nonspherical
Nonclose-packed
Online Access:http://dx.doi.org/10.1007/s11671-009-9400-0

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